3D optické profilometry

3D optické profilometry
3D mikroskop (WLI)


• Interferometr bílého světla (WLI)

• Konfokální mikroskop

• Zobrazování v jasném poli

• Zobrazování v tmavém poli


Nanometer resolution 3D optical profilometers. Advanced, modular, and compact 3D optical profilers with automatic measurement and analysis.


Choose Between The Best 3D Optical Profilometers


The high-resolution 3D optical profilometers combine many optical imaging techniques on one platform. Measure roughness, step height, texture, geometry, thickness, and more for any material.


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Confocal Microscope + Interferometer + AFM, Raman, Spectral Film Thickness and More
Confocal Microscope + Interferometer + Dark Field Imaging and More
White Light Interferometer


High Speed Analysis



Highest Z Resolution



Versatile Platform



Powerful Software


Industry leading high-resolution camera with 200 FPS for high speed scanning. State of the art encoders provide the highest Z resolution independent of scanning distance. Open frame design and customizable XY stage. Environmental controls and many sample holders to accommodate various shapes. Precise, easy to use, automatic, quantitative, and ISO-compliant Software.

Why 3D Optical Profilometers?


Rtec Instruments optical profilers’ revolutionary surface profiling analyzes any surface with ease. Magnify images and measure features from nm to mm on a single platform. As a result, our optical systems investigate atomic structures with a single click. Furthermore, our optical profilers measure roughness, waviness, film thickness, and chemical property map. This comprehensive surface profiling approach is the first in the industry.


We Deliver

High Quality



Instruments come with standard test protocols to ensure normalized testing.

Surface Analysis For Every Sample and Situation

Sub-Nanometer 3D Features

Rtec 3D Optical Microscopes analyze nm features on rough, transparent, or smooth surfaces. We provide the highest Z and XY optical profilometry resolutions. Additionally, confocal microscopy and white light interferometry are on the same platform.

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Micro Fluidic Channels Transparent Coating Polymer Coating


Wafers and Semiconductors

With stages up to 300×300 mm, analyze full wafer, devices, and pellicles. Check for defects, structures, step height, thickness, particles, and more. Combine AFM, Raman, and 3D optical profilometer data for the same area.



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Quality Control


Find cracks and defects with one click. Our 3D optical profilers provide automatic reports and pass-fail criteria analysis. Rtec metrology platforms are the solution for R&D and quality control environments.



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Turning Sample Scratch Indentation

What Are 3D Optical Microscopes?

3D optical microscopes characterize three-dimensional surface topography. First, they optically capture multiple surface images. Then, the microscope stitches the images together in XYZ axis. Finally, they quantifying the data to calculate roughness, step height, film thickness, curvature, bow, and defects. However, all this is not possible with traditional 2D optical microscopy. Our 3D optical profilers use a combination of techniques to provide a quantitative 3D surface. Learn more about these techniques below.




What Is Nipkow Confocal Imaging?


What Is A White Light Interferometer?


Confocal microscopy is a non-contact optical imaging technique. It allows for higher resolution and contrast of surface topography utilizing pin holes. First, these pin holes block out-of-focus light during image scanning. Then, white light and a Nipkow confocal disk capture a large sample area at a very high speed creating a three-dimensional scan. The UP-5000 and UP-3000 3D optical microscopes have this feature.


White light interferometry (WLI) is a non-contact optical method. WLI characterizes surface topography using scanning interferometry. The technique involves a beam splitter that splits a light beam into a measurement beam and a reference beam. Then these beams are then recombined to create an interference pattern and are then analyzed to generate 2D and 3D models of surfaces. Rtec Instruments’ UP-2000 WLI Optical Profilometers specialize in this feature.





What is Dark Field Imaging?


What Is Variable Focus Imaging?


Dark field microscopy is a technique that creates high resolution contrast in specimens that are not imaged well under normal bright field imaging conditions. Using special dark field objectives and a dedicated light system, a dark background  is created. This allows for a high degree of contrast for surface features. All Rtec 3D Optical microscopes provide dark field microscopy. Variable Focus Imaging is an imaging technique used to get a surface image completely in focus. Our microscopes complete this by capturing images at different X, Y, and Z values. Then they stitch the images together to create a fully focused bright field profile of the surface. Both 2D and 3D images use this technique. Each of the Rtec Instruments 3D Optical Microscopes use variable focus imaging for crystal clear imaging.

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